JOHANN, Ong; TAMALDIN, Noreffendy. Salicide Residues Defects Characterization and Reduction in Front-End Pre-Metal Cleaning Process Wafer Fabrication. Engineering And Technology Journal, [S. l.], v. 7, n. 8, p. 1409–1418, 2022. DOI: 10.47191/etj/v7i8.03. Disponível em: https://everant.org/index.php/etj/article/view/680. Acesso em: 22 jul. 2024.