Analysis of Nonlinear Vibration Arising in Micro-Electromechanical System
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In this work, the nonlinear vibration arising in the micro-electromechanical system is investigated by using the equivalent linearization method based on a weighted averaging concept. The analytical solution of the system is carried out, and the relationship between the frequency and the initial amplitude is established in a closed analytical form. In order to verify the accuracy of the present method, some illustrative examples are analyzed in detail and the results are compared with other analytical and numerical solutions.
W. M. Zhang, H. Yan, Z. K. Peng, and G. Meng, “Electrostatic pull-in instability in MEMS/NEMS: A review,” Sensors and Actuators, A, 214, 187–218, 2014.
E.M. Abdel-Rahman, M.I. Younis, A.H. Nayfeh. Characterization of themechanical behavior of an electrically actuated microbeam. Journal of Micromechanics and Microengineering, 12, pp. 759-766, 2002.
J.H. Kuang, C.J. Chen. Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method. Journal of Micromechanics and Microengineering, 14, pp. 647-655, 2004.
J.H. Kuang, C.J. Chen. Adomian decomposition method used for solving nonlinear pull-in behavior in electrostatic micro-actuators. Mathematical and Computer Modelling, 41, pp. 1479-1491, 2005.
M.I. Younis and A.H. Nayfeh. A Study of the Nonlinear Response of a Resonant Microbeam to an Electric Actuation. Nonlinear Dynamics, 31, pp. 91–117, 2003.
Y. Fu, J. Zhang, and L. Wan. Application of the energy balance method to a nonlinear oscillator arising in the microelectromechanical system (MEMS). Current Applied Physics, 11, pp. 482-485, 2011.
Y.H. Qian, D.X. Ren, S.K. Lai, S.M. Chen. Analytical approximations to nonlinear vibration of an electrostatically actuated microbeam. Commun Nonlinear Sci Numer Simulat, 17, pp. 1947–1955, 2012.
M. Bayat, M. Bayat, I. Pakar. Nonlinear vibration of an electrostatically actuated microbeam. Latin American Journal of Solids and Structures, 11, pp. 534 – 544, 2014.
N. Krylov, N. Bogoliubov. Introduction to nonlinear mechanics. New York: Princenton University Press, (1943).
T.K. Caughey. Equivalent linearization technique. The Journal of the Acoustical Society of America, 35, pp. 1706–1711, 1959.
N.D. Anh, W. Schiehlen. New criterion for Gaussian equivalent linearization. European Journal of Mechanics - A/Solids, 16, pp. 1025–1039, 1997.
N.D. Anh, M. Di Paola. Some extensions of Gaussian equivalent linearization. Proceedings of the International Conference on Nonlinear Stochastic Dynamics. pp. 5–16. Hanoi, Vietnam (1995).
N.D. Anh. Short Communication Dual approach to averaged values of functions: a form for weighting coefficient. Vietnam Journal of Mechanics, 37(2), pp. 145 – 150, 2015.
N.D. Anh, N.Q. Hai, D.V. Hieu. The Equivalent Linearization Method with a Weighted Averaging for Analyzing of Nonlinear Vibrating Systems. Latin American Journal of Solids and Structures, 14, pp. 1723-1740, 2017.